Welcome: Supsemi 电子科技有限公司
sales@supsemi.com
+86-18059149998
该真空探针台系统包括：
1.真空室；
2.样品阶段；
3.温度控制器；
4.探测；
5.探头定位台；
6.数字显微镜；
7.真空泵；
8.真空计
以下是每台设备的技术规格。
| Vacuum Chamber | |
| Model | SUP-Z1604T-RL (Could adjust high and low temperatures, Different with SUP-Z1604TZ) |
| Type | Heating and cooling type Room temperature to -190 ℃~400 ℃ |
| Material of the cavity | 304 stainless steel |
Internal dimensions of the cavity | diameter 160x90mm. |
| Window size on the cavity | Φ 68mm (optional concave window Φ 42mm) |
| Chamber exhaust port | KF40 or KF25, vacuum flange optional |
| Chamber air inlet | Metric 3mm 6mm tracheal connector, British system 1/8mm 1/4mm tracheal connector optional |
| Chamber outlet | 8mm pagoda joint |
| Positive pressure of the cavity | ≤ 0.05MPa; |
| Vacuum degree of chamber | Mechanical pump ≤ 5Pa (5 minutes); Molecular pump ≤ 5E-3Pa (30 minutes) |
| Sample Stage | |
| Sample table material | 304 stainless steel |
| Sample table size | Φ 60mm |
| Distance from sample stage to window | 65mm (optional concave window spacing of 25mm) |
| Sample stage temperature sensor: | Class A PT100 platinum resistor |
| Sample stage temperature | from room temperature to 400 ℃ or from room temperature to -190℃ |
| Sample stage temperature measurement error | ± 0.5 ℃ |
| Sample stage temperature change rate | high temperature 20 ℃/min |
| Temperature Controller | |
| Temperature display | 7-inch human-machine interface |
| Temperature control type | standard PID temperature control+self-tuning (optional 30 segment programming temperature control) |
| Temperature resolution | 0.1 ℃ |
| Temperature control accuracy | ± 0.5 ℃ |
| Temperature signal input type | PT100 thermistor (optional K S B thermocouple) |
| Temperature control output | DC linear power supply heating (liquid nitrogen flow rate linear control liquid nitrogen refrigeration) |
| Auxiliary function | temperature data collection and export real-time temperature curve+historical temperature curve |
| Probe | |
| Electrical signal connector | wiring adapter ,BNC connector, BNC triple coaxial connector , SMA connector ,Banana plug, wire length 1.2 meters |
| Electrical performance | Insulation resistance ≥ 4000M Ω, dielectric withstand voltage ≤ 200V, current noise ≤ 10pA |
| Number of probes | 4 probes (6 probes can be customized) |
| Probe material | gold-plated tungsten needle |
| Probe tip | 10 μ m |
| Probe Positioning Stage | |
| X-axis travel | 40mm ± 20mm |
| X-axis control accuracy | ≤ 5 μ m |
| Y-axis travel | 25mm ± 12.5mm |
| Y-axis control accuracy | ≤ 5 μm |
| Z-axis travel | 25mm ± 12.5mm |
| Z-axis control accuracy | ≤ 5 μm |
| Digital Microscope | |
| Microscope Category | Objective Magnification+Electron Magnification |
| Microscope magnification | 37.5-256 times |
| Microscope field of view range | 7.58mmX5.69mm-1.39mmX1.11mm |
| Microscope working distance | 100-95mm |
| Camera pixel | 20 megapixel CMOS sensor |
| Camera pixel size | 1.335 μ m X1.335 μ m |
| Camera resolution | 1080P 60fps camera 5120X3840 |
| Camera signal output | HDMI output+USB output |
| LED Adjustable Light Source | Circular Light Source |
| Display screen | 13 inch IPS screen |
| Display input interface | HDMI |
| Vacuum pump | |
| model | VRD-8 |
| pumping speed | 8m ³/H |
| maximum pressure | 0.1Pa, |
| power supply | 110V - 220V |
| power | 0.4KW |
| noise | ≤ 52 dB |
| weight | 21KG |
| oil volume | 1L |
| Vacuum gauge | |
| model | PG800 |
| Principle | heat conduction constant temperature type |
| measurement range | 1E 5Pa -1E1Pa |
| measurement accuracy | 1E-1-1E4Pa (± 10% reading), 1E4Pa-1E5Pa (± 20% reading) |
| Repeatability of vacuum gauge measurement | 1E-1-1E4Pa (± 2% reading) |
联系人：Bruce Liu
手机：+86-18059149998
电话：+86-18059149998
邮箱：sales@supsemi.com
地址： 福建省龙岩市新罗区西陂街道西山村西陂路89号1幢1402室
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