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​Automated RTP Tube Furnace Max 1200C Max 6

Product Name: ​Automated RTP Tube Furnace Max 1200C Max 6" for AI Material Research

Product Model: OTF-1200XS6-ASD

Product Description: OT​F-1200XS6-ASD is a 6" OD automatic tube furnace up to 1200°C. It automates the pump-purge cycles, gas flow, heating, and cooling in a sequence via one click via PC.

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Product Description

OTF-1200XS6-ASD is a 6" OD automatic tube furnace up to 1200°C. It automates the pump-purge cycles, gas flow, heating, and cooling in a sequence via one click via PC. With the assistance of a robot for sample loading and retrieval, it can operate autonomously 24×7 to accelerate next-generation material discovery. It also supports remote PC control, monitoring, and data logging to link up to 8 furnaces.  

Product Parameters

Product Name

Automated RTP-Tube-Furnace.html target='_blank'>RTP Tube Furnace Max 1200C Max 6" for AI Material Research 

Model

OTF-1200XS6-ASD

Utility

• 208-240VAC, 50/60Hz, 6 kW

• Recirculating chilled water

Automation Process

• Sample loading (assisted by a robotic arm)

• Pump-purge cycles

• Steady gas flow

• Heating, dwelling, and cooling

• Sample retrieval (assisted by a robotic arm)


Furnace

• Double-layer steel structure with a protective cover. 

• High-purity alumina fibrous insulation for better energy-saving

• Motorized sliding sample stage for sample loading and retrieval.

Working Temperature

<1100°C

Heating Area  

350 mm, single-zone

Heating Element

FeCrAl: Mo

Heating Rate
≦10°C/min
TubeQuartz, Ø150×600 mm
Temperature Controller

• PID programmable temperature controller

• Up to 50 temperature segments. 

• Control accuracy ±1°C

Flange Set

• 304 stainless steel water-cooled flanges

• Ø12 push-to-connect chilled water inlet/outlet

• One 1/4" compression tube fitting each side as gas inlet and outlet

• One 1/4" quick-connect port for in-situ temperature measurement

• One KF25 port for vacuum generation

Sample Stage

• A quartz sample stage with 4 cavities.

• 4 quartz crucibles Ø40 × 30 mm (22 ml)

• Crucibles in different materials, such as alumina, graphite, magnesia, are available upon request.

• Wafer holders for 1-4" are also available upon request. 

• Customized sample holder is also available upon request.

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Control Panel & Software

• Free LabVIEW-based software for remote PC control, monitoring, and data logging 

• Ethernet TCP/IP communication port

• PC operation software supports 8 sets of furnaces

• One laptop with preinstalled software and communication cables. 

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Dimensions

Dimensions: 

Dimensions: 1200mm (L) × 860mm (W) × 1000 mm (H) 

Weight::  200 Kg


Warranty

One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).

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Contact: Bruce Liu

WhatsApp: +86-18059149998

Tel: +86-18059149998

Email: sales@supsemi.com

Add: Room 1402, Building 1, No. 89 Xibeilu, Xishancun, Xibei Street, Xinluo District, Longyan City, Fujian Province