1200C Tube Furnace with High Vacuum and 3 Channel Gas Flow Station for CVD or Diffusion

Product Name: 1200C Tube Furnace with High Vacuum and 3 Channel Gas Flow Station for CVD or Diffusion

Product Model: OTF-1200X-HVC3

Product Description: The OTF-1200X-HVC series furnace workstation consists of an OTF-1200X series tube furnace, a precision mass flow gas control station, a high vacuum station, and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-4 torr (with our sealing assembly provided).

Product Description

The OTF-1200X-HVC series furnace workstation consists of an OTF-1200X series tube furnace, a precision mass flow gas control station, a high vacuum station, and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-4 torr (with our sealing assembly provided).

The mass flow gas control station mixes three kinds of gas together and allows the mixed gas to flow into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protected.

Product Parameters

Furnace Structure
Casing	• Double-layer steel casing with air cooling. • Built-in thermostat to control Cooling running automatically when case > 55°C.
Processing Tube	Material: Fused quartz tube One processing tube is included with the furnace. Please contact us to specify the tube diameter.
Power	2.5KW
Rated Voltage	AC 208-240V Single phase, 50/60Hz
Heating Element	Fe-Cr-Al Alloy doped by Mo
Working Temp.	• Max. Heating Temp.: 1200°C • Continuous Working Temp: 1100°C
Heating Zone Length	• Total heating zone: 440mm • Constant Temp. Zone: 150mm (±1°C)
Temp. Control	• PID automatic control with 30 steps programmable segments. • Temperature accuracy: ±1°C • Thermocouple: K type built inside the furnace
Vacuum Seal	One pair of stainless steel vacuum flange with: • one mechanical pressure gauge • two needle valves • one KF-25 connector for the high vacuum station.
High Vacuum Station Structure	• Mobile cart size: 600 (L) x 600 (W) x 700(H), mm • Max. Loading: 600 Lbs on top • Molecular pump control Panel: LCD digital • Inside: Pfeiffer vacuum pump made in Germany. • Vacuum sensor is included.
Volume Flow Rate	• Nitrogen N2 33 L/s • Helium He 39 L/s (2340L/minute) • Hydrogen H2 32 L/s
Working Range	From 1000 mbar to <1E-7 mbar
Ultimate Pressure	<1E-8 mbar (without any leaking )
Mass Flow Gas Control Structure	• Made of 316 stainless steel valve Gas mixing tank: Φ80X120mm 600mm(L) x 745mm(W) x 700mm(H) 6" color touch screen control panel to make parameter setting at easy. • Touchscreen Control and PC remote switchable.
Mass Flow Gas Control Power	23W per channel
Mass Flow Gas Control Voltage	AC 220V/50Hz Single phase
Warranty	One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).