1200C Three Zones Tube Furnace with High Vacuum Station 4 Channel MFC Gas Station for CVD or Diffusion

Product Name: 1200C Three Zones Tube Furnace with High Vacuum Station 4 Channel MFC Gas Station for CVD or Diffusion

Product Model: OTF-1200X-III-HVC-LD

Product Description: The OTF-1200X-III-HVC series furnace workstation consists of an OTF-1200X-III series three-zone tube furnace, a precision mass flow gas control station, a high vacuum station, and other assembling parts. It is competent for the experiments as CVD, Diffusion, and other thermo-treatments under vacuum status and shielding gas protection.

Product Description

The OTF-1200X-III-HVC series furnace workstation consists of an OTF-1200X-III series three-zone tube furnace, a precision mass flow gas control station, a high vacuum station, and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-4 torr (with our sealing assembly provided).

The mass flow gas control station mixes several kinds of gas together and inputs the mixed gas into a fused quartz tube inside the furnace.

It is competent for the experiments as CVD, Diffusion, and other thermo-treatments under vacuum status and shielding gas protection. The furnace comes with a 4-channel digital LED display mas flow gas control station.

Product Parameters

OTF-1200X-III series tube furnace
Casing	• Double-layer steel casing with air cooling. • Built-in thermostat to control Cooling running automatically when case > 55°C.
Processing Tube	Material: Fused quartz tube One processing tube is included with the furnace. Please contact us to specify the tube diameter.
Power	7KW
Rated Voltage	AC 208-240V Single phase, 50/60Hz
Heating Element	Fe-Cr-Al Alloy doped by Mo
Working Temp.	• Max. Heating Temp.: 1200°C • Continuous Working Temp: 1100°C
Heating Zone Length	Total heating zone: 900mm (300mm + 300mm + 300mm)
Temp. Controller	• Three precision temperature controllers to control three zones separately. • PID automatic control with 30 steps programmable segments. • Temperature accuracy: ±1°C • Thermocouple: K type built inside the furnace
Vacuum Seal	One pair of stainless steel vacuum flange with: • one mechanical pressure gauge • two needle valves • one KF-25 connector for the high vacuum station.
High Vacuum Station Structure	• Mobile cart size: 600 (L) x 600 (W) x 700(H), mm • Max. Loading: 600 Lbs on top • Molecular pump control Panel: LCD digital • Inside: Pfeiffer vacuum pump made in Germany • A vacuum sensor is included
Volume Flow Rate	• Nitrogen N2 33 L/s • Helium He 39 L/s (2340L/minute) • Hydrogen H2 32 L/s
Working Range	From 1000 mbar to <1E-7 mbar
Ultimate Pressure	<1E-8 mbar (without any leaking )
Mass Flow Gas Control Structure	• 2-9 Channel Gas Control System with PLC Touch Panel and PC Operation Software LED display • 4 channel MFC Made of 316 stainless steel with gas flow range as below: Controller 1: 0~100SCCM Controller 2: 1~199 SCCM Controller 3: 1~199 SCCM Controller 4: 1~499 SCCM • 4 Channel gas goes through a Gas mixing tank: Φ80X120mm Dimension: 600(L) x 745(W) x 700(H), mm
Mass Flow Gas Control Power	18W
Mass Flow Gas Control Voltage	AC 208-240V, Single phase, 50/60Hz
Warranty	One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).