Split Three-Zone Tube Furnace With Vacuum Pump System And PLC Touch Panel For CVD Or Diffusion

Fe-Cr-Al Alloy doped by Mo

Max. Heating Temp.

1200℃

Continuous Heating Temp.

1100℃

Max. Heating Rate

<=20°C/min

Heating Zone Length

• Three zones:   (880mm,  35" in total)

• Zone 1: 220 mm + Zone 2:  440 mm + Zone 3: 220 mm

Tube Size and Materials

Fused Quartz Tube

100 mm O.D x 92 mm ID. x 1400 mm

Temp. Controller

• Three programmable precision digital temperature controllers with 30 segments, which control each heating zone separately.

• PID adjustable with auto tune function to ensure temperature stability within  +/ - 1 oC.

• Full protection in each controller for over-temperature and broken thermal couple.

Three K-type thermocouples

• Two stainless steel vacuum flanges with KF-25 pump connector, two needle valve and one 1/4" Swagelok tube connector.

• Six pieces of  high-temperature silicone O-ring for using under 300°C.

• Two pairs of alumina thermo-blocks are included for protecting flange from heat radiation.

• One KF-40 vacuum bellows

• Three KF-40 quick clamps.

• Two KF-25 quick clamps.

HV Station
High Vacuum Station

Structure:

• Mobile cart size:  600 (L) x 600 (W) x 700(H), mm

• Max. Loading:       600 Lbs on top

• Molecular pump control Panel:   LCD digital

• Inside:   Pfeiffer vacuum pump  Made in Germany

• Vacuum sensor is included

Vacuum sensor:

• The vacuum sensor has a KF-25 connector.

• High vacuum gauge (measuring range 10^-8 mbar ~ 10^3 mbar)

Control Panel

• One button operation - the diaphragm pump and the turbomolecular pump will start after pressing the "start" button.

• System controlled spinning speed - the controller will control the speed of the turbine spinning up and down according to the vacuum level and leaking rate of the reaction chamber.

• Self-protection - the system will protect the pump from damage by overheating and overcurrent if the leaking rate of the reaction chamber is too high to achieve the high vacuum.

• LCD screen - double lines parameters checking interface make the working easier to be handled.

Volume Flow Rate:

• Nitrogen   N2     33 L/s

• Helium     He     39 L/s   (2340L/minute)

• Hydrogen   H2     32 L/s

Working Range: From 1000 mbar to <1E-7 mbar

Ultimate Pressure:10^-5 torr (with tube furnace)

MFC Station

Mass Flow Controller

9 precision mass flow meters controllers are installed in the bottom mobile cart with the digital display panel of +/-1.5% of Full Scale.

• Controller 1: 0~100 SCCM

• Controller 2: 1~199 SCCM

• Controller 3: 1~199 SCCM

• Controller 4: 1~499 SCCM

• Controller 5-9: measuring range can be customized upon request

• Each MFC Station has four 1/4" Swagelok tube connects. And four on/off valves for each gas route. The fifth one is used as the gas outlet.

• The 1/4" PTFE gas pipe is included in the standard package.

One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).