Stainless Steel Vacuum Chamber Plasma Cleaner

Product Introduction

This equipment consists of ion power supply, vacuum pumping system, gas filling system, automatic control system and other components.

Its working principle is as follows: under vacuum environment, gas can be ionized under controlled standardized processing conditions. The vacuum pump evacuates the chamber to a vacuum degree of 30–40 Pa. Then the high-frequency generator ionizes the gas to form plasma, the fourth state of matter.

It is characterized by highly uniform glow discharge, which emits visible light ranging from blue to deep purple depending on different process gases. The material treatment temperature stays close to room temperature.

These highly reactive microparticles interact with material surfaces to achieve various surface modification effects, including improved hydrophilicity, hydrophobicity, low friction, high cleanliness, surface activation and etching.

Basic Product Structure

RF Power Supply Unit: RF generator, RF adjustment, power amplification, power regulation, power output, output protection, plasma electrode, temperature protection

System Control Unit: Digital automatic control, I/O control, A/D vacuum detection, pulse width proportional D/A regulation, parameter storage, timing setting

Vacuum & Gas Circuit Unit: Vacuum system, process gas supply, flow regulation, venting and pipeline components

For small Plasma Cleaners with low RF power, the RF power supply and control unit are integrated into a single cabinet. This design saves space and facilitates operation and placement. Compared with large-size models, its detection and control functions are streamlined. Figure 1 shows the appearance of the small unit.

The unit frame and doors are coated with scratch-resistant baking paint for durability. The aluminum automatic door adopts oxidation and sandblasting treatment for an elegant smooth finish. The inner surface of the stainless steel chamber is polished for easy cleaning. The circuit features overcurrent protection and modular design for quick maintenance. Equipped with a PLC human-machine interface, it supports precise timing as well as manual, automatic and vacuum pressure holding modes. Self-balancing rubber shock-absorbing feet ensure stable operation.

Main Product Parameters

Standard  Accessories