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sales@supsemi.com
+86-18059149998
Model HX-002 is a compact vacuum high-low temperature probe station designed for university labs and enterprise research centers, equipped with up to 6 external vacuum probe arms to support capacitance-voltage and semiconductor electrical characterization.
Product Features:
Model HX-002 adopts liquid nitrogen cooling, offering a broad temperature range from 77K to 873K with a minimum temperature resolution of 0.001K. It comes with a 12MP coaxial microscope for accurate inspection of tiny device pads. Capable of reaching 10⁻⁶ torr high vacuum and boasting probe movement accuracy as low as 0.5μm, this station perfectly fits vacuum low/high-temperature electrical tests on semiconductors, optoelectronic components and 2D materials.
The standard package of HX-002 includes 5 parts: chamber, microscope, probe arms, probe fixtures and probes. Vacuum pumps, source meters and other peripherals are available as optional add-ons.
Product Parameters:
| Chamber | Sample Stage Size | 1.5 inches |
| Sample Fixation Method | Spring clips | |
| Viewing Window | 2 inches | |
| Vacuum Level | 10⁻³ torr (mechanical pump) / 10⁻⁶ torr (turbo molecular pump) | |
| Probe Arm Ports | Up to 6 probe arm interfaces | |
| Other Interfaces | Electrical signal port, vacuum port, temperature control port | |
| Cooling Method | Liquid nitrogen | |
| Temperature Control Unit | Temperature controller | |
| Temperature Range | 77K–473K / 573K / 873K | |
| Temperature Resolution | 0.1K / 0.01K / 0.001K | |
| Temperature Stability | ±1K / ±0.1K / ±0.01K | |
| Microscope | Movement Mode | Full-range movement |
| Light Source | Coaxial light source | |
| CCD Camera | 12 megapixels | |
| Microscope Objective Magnification | 0.6X–5X | |
| Optical Total Magnification | 18–200× | |
| Focus Travel | 42 mm | |
Probe Arm | X-Y-Z Travel | Y: 50 mm + XYZ: 12 mm × 12 mm × 12 mm |
| Structure | External probe arm with vacuum bellows design | |
| Positioning Accuracy | 2 μm / 0.5 μm | |
Probe Holder | Cables | Coaxial cable / triaxial cable |
| Leakage Current Accuracy | 10 pA / 100 fA / 10 fA | |
| Probe Fixing | Screw fastening | |
| Connector Types | BNC / triaxial / banana plug / alligator clip / terminal block | |
| Supported Frequency Range | DC – 100 MHz | |
Probe Tips | Tip Sizes | 0.2 μm / 1 μm / 2 μm / 5 μm / 10 μm / 20 μm / 50 μm / 100 μm |
| Material | Tungsten steel / beryllium copper |
Contact: Bruce Liu
WhatsApp: +86-18059149998
Tel: +86-18059149998
Email: sales@supsemi.com
Add: Room 1402, Building 1, No. 89 Xibeilu, Xishancun, Xibei Street, Xinluo District, Longyan City, Fujian Province
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